Solar Cell (Thin Film) Fabrication Facility
1. Plasma Enhanced CVD CT150
2. Plasma Enhanced CVD CT100
Material Deposition Fabrication Laboratory
1. RF Sputtering Unit
2. Reactive Ion Etching Unit
3. Thermal and E-Beam Evaporation Unit
Diffusion Laboratory
1. P/P+ & N/N+ Diffusion furnace
Lithography Laboratory
1. Surface Conformal Imprint Lithography Laboratory
2. Master stamps
Created: 23 November 2019